Dear colleagues,

 

Micro- and Nano-electromechanical Systems (MEMS) is an interdisciplinary field that integrates various technologies such as micro-mechanical, electronic, optical, and chemical techniques. Its goal is to utilize micro-scale processing technology to integrate small mechanical and electronic components together, achieving miniaturization, integration, intelligence, and functionality. MEMS technology has the advantages of simple structure, small size, light weight, low power consumption, high reliability, and low cost, and is widely used in biomedical, information communication, environmental monitoring, industrial automation, intelligent transportation, and other fields. The development of MEMS technology is closely related to microelectronics, which is based on semiconductor processes and microelectronic technology, and involves multiple manufacturing technologies such as mechanical machining, optical processing, and chemical processing. In summary, MEMS technology is an interdisciplinary field with a wide range of application prospects. Its development will greatly promote the progress and application of microelectronics technology, nanotechnology, and materials science.

 

Thus, we are interested in the Micro- and Nano-electromechanical Systems, micro-nano processing technology, design and manufacture of MEMS, and application and development of MEMS.

 

For this, it is important to collect the experiences Micro- and Nano-electromechanical Systems that have been implemented and consider their impacts. Research articles and reviews in this area of study are welcome.

 

We look forward to receiving your contributions.

Micro- and Nano-electromechanical Systems; micro-nano processing technology; design and manufacture of MEMS; application and development of MEMS